An attempt to specify thermal history in CZ silicon wafers and possibilities for its modification
| Autor: | Kissinger, G., Sattler, A., Müller, T., von Ammon, W. |
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| Zdroj: | In Physica B: Physics of Condensed Matter 2007 401:126-129 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect