Enhancement of oxygen precipitation in Czochralski silicon wafers by high-temperature anneals
| Autor: | Zhong, Ling, Ma, Xiangyang, Tian, Daxi, Yang, Deren |
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| Zdroj: | In Physica B: Physics of Condensed Matter 2006 376:169-172 |
| Databáze: | ScienceDirect |
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