Generalized infrared ellipsometry study of thin epitaxial AlN layers with complex strain behavior
| Autor: | Darakchieva, V. *, Schubert, M., Birch, J., Kasic, A., Tungasmita, S., Paskova, T., Monemar, B. |
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| Zdroj: | In Physica B: Physics of Condensed Matter 31 December 2003 340-342:416-420 |
| Databáze: | ScienceDirect |
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