Enhanced formation of thermal donors in oxygen-implanted silicon annealed at different pressures
| Autor: | Neustroev, E.P., Antonova, I.V. *, Popov, V.P., Kilanov, D.V., Misiuk, A. |
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| Zdroj: | In Physica B: Physics of Condensed Matter 2000 293(1):44-48 |
| Databáze: | ScienceDirect |
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