Atomic-scale smoothing of semiconducting oxides via plasma-enabled atomic-scale reconstruction
| Autor: | Zhang, Yongjie, Tang, Jin, Liang, Shaoxiang, Zhao, Junlei, Hua, Mengyuan, Zhang, Chun, Deng, Hui |
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| Zdroj: | In International Journal of Machine Tools and Manufacture March 2024 196 |
| Databáze: | ScienceDirect |
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