Estimation and correction method for the two-dimensional positionerrors of a planar XY stage based on motion error measurements
| Autor: | Hwang, Jooho, Park, Chun-Hong, Lee, Chan-Hong, Kim, Seung-Woo |
|---|---|
| Zdroj: | In International Journal of Machine Tools and Manufacture 2006 46(7):801-810 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect