An atomic force microscope-like dual-stage force controlled fast tool servo for in-process inspection of micro-structured surfaces
| Autor: | Meng, Yixuan, You, Zhichao, Wang, Xiangyuan, Zhu, Zhiwei, Zhang, XinQuan, Ren, Mingjun, Zhu, LiMin |
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| Zdroj: | In Mechanical Systems and Signal Processing 1 October 2024 219 |
| Databáze: | ScienceDirect |
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