Influence of the deposition temperature on the optical and electrical properties of TiN film by spectroscopic ellipsometry
| Autor: | Ma, Qunchao, Shi, Xinwei, Bi, Longtao, Li, Jing, Zhou, Qiang, Zhu, Bailin |
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| Zdroj: | In Superlattices and Microstructures March 2021 151 |
| Databáze: | ScienceDirect |
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