Interdiffusion of Al and Ga in AlN/AlGaN superlattices grown by ammonia-assisted molecular beam epitaxy
| Autor: | Nemoz, M., Semond, F., Rennesson, S., Leroux, M., Bouchoule, S., Patriarche, G., Zuniga-Perez, J. |
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| Zdroj: | In Superlattices and Microstructures February 2021 150 |
| Databáze: | ScienceDirect |
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