Effects of Ⅴ/Ⅲ ratio and Cp2Mg flow rate on characteristics of non-polar a-plane Mg-delta-doped p-AlGaN epi-layer

Autor: Fan, Aijie, Zhang, Xiong, Chen, Shuai, Li, Cheng, Lu, Liang, Zhuang, Zhe, Lyu, Jiadong, Hu, Guohua, Cui, Yiping
Zdroj: In Superlattices and Microstructures September 2020 145
Databáze: ScienceDirect