Structural characterization of AlN (11-22) films prepared by sputtering and thermal annealing on m-plane sapphire substrates
| Autor: | Feng, Qiong, Ai, Yujie, Liu, Zhe, Yu, Zhiguo, Yang, Kun, Dong, Boyu, Guo, Bingliang, Zhang, Yun |
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| Zdroj: | In Superlattices and Microstructures May 2020 141 |
| Databáze: | ScienceDirect |
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