Improvement of transparent conductive properties of GZO/Cu/GZO tri-layer films by introducing H2 into sputtering atmosphere
Autor: | Zhu, B.L., Ma, J.M., Lv, K., Wang, C.J., Wu, J., Gan, Z.H., Liu, J., Shi, X.W. |
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Zdroj: | In Superlattices and Microstructures April 2020 140 |
Databáze: | ScienceDirect |
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