Improvement of transparent conductive properties of GZO/Cu/GZO tri-layer films by introducing H2 into sputtering atmosphere

Autor: Zhu, B.L., Ma, J.M., Lv, K., Wang, C.J., Wu, J., Gan, Z.H., Liu, J., Shi, X.W.
Zdroj: In Superlattices and Microstructures April 2020 140
Databáze: ScienceDirect