Micro-scale modification of diamond-like carbon and copper electroplating by scanning probe field emission current method
Autor: | Hayashi, Shigehiro, Antoku, Yuki, Han, Younggun, Choi, Woon, Tomokage, Hajime |
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Zdroj: | In Superlattices and Microstructures 2009 45(4):326-331 |
Databáze: | ScienceDirect |
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