Micro-scale modification of diamond-like carbon and copper electroplating by scanning probe field emission current method

Autor: Hayashi, Shigehiro, Antoku, Yuki, Han, Younggun, Choi, Woon, Tomokage, Hajime
Zdroj: In Superlattices and Microstructures 2009 45(4):326-331
Databáze: ScienceDirect