Formation of Ge nanocrystals and evolution of the oxide matrix in as-deposited and annealed LPCVD SiGeO films
| Autor: | Rodríguez, A., Morana, B., Sangrador, J., Rodríguez, T., Kling, A., Ortiz, M.I., Ballesteros, C. |
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| Zdroj: | In Superlattices and Microstructures 2009 45(4):343-348 |
| Databáze: | ScienceDirect |
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