Silicon nanoparticles synthesized in SiO 2 pockets by stencil-masked low energy ion implantation and thermal annealing
| Autor: | Grisolia, J., Dumas, C., Ben Assayag, G., Bonafos, C., Schamm, S., Arbouet, A., Paillard, V., van den Boogaart, M.A.F., Brugger, J., Normand, P. |
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| Zdroj: | In Superlattices and Microstructures 2008 44(4):395-401 |
| Databáze: | ScienceDirect |
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