Focused ion beam based sputtering yield measurements on ZnO and Mo thin films
| Autor: | Horváth, E., Németh, A., Koós, A.A., Bein, M.C., Tóth, A.L., Horváth, Z.E., Biró, L.P., Gyulai, J. |
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| Zdroj: | In Superlattices and Microstructures 2007 42(1):392-397 |
| Databáze: | ScienceDirect |
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