Thermal oxidation of n-type ZnN films made by [formula omitted]-sputtering from a zinc nitride target, and their conversion into p-type films
Autor: | Kambilafka, V., Voulgaropoulou, P., Dounis, S., Iliopoulos, E., Androulidaki, M., Šály, V., Ružinský, M., Aperathitis, E. |
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Zdroj: | In Superlattices and Microstructures 2007 42(1):55-61 |
Databáze: | ScienceDirect |
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