Single-electron transistors fabricated with sidewall spacer patterning

Autor: Park, Byung-Gook, Kim, Dae Hwan, Kim, Kyung Rok, Song, Ki-Whan, Lee, Jong Duk
Zdroj: In Superlattices and Microstructures 2003 34(3):231-239
Databáze: ScienceDirect