Sputter crater formation in the case of microsecond pulsed glow discharge in a Grimm-type source. Comparison of direct current and radio frequency modes
| Autor: | Efimova, Varvara, Hoffmann, Volker, Eckert, Jürgen |
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| Zdroj: | In Spectrochimica Acta Part B: Atomic Spectroscopy October 2012 76:181-189 |
| Databáze: | ScienceDirect |
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