Advanced model for the simulation of BST-film growth with MOCVD
| Autor: | Vorob’ev, A.N., Archakov, I.Yu., Bord, O.V., Smirnov, S.A., Karpov, S.Yu., Makarov, Yu.N., Reinhold, M., Schumacher, M., Heuken, M. |
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| Zdroj: | In Synthetic Metals 2003 138(1):145-151 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect