Use of Si KLL Auger shifts and the Auger parameter in XPS to distinguish Ti silicides from a Ti/Si mixture in thin films
| Autor: | Saheli, Ghazal, Kuratomi, Takashi, Chen, I-cheng, Mack, Paul, LaziK, Christopher, Anthis, Jeffrey, Thompson, David M., Brundle, Christopher R. |
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| Zdroj: | In Journal of Electron Spectroscopy and Related Phenomena July 2019 234:57-63 |
| Databáze: | ScienceDirect |
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