Effects of atomic layer etching on magnetic properties of CoFeB films: Reduction of Gilbert damping

Autor: Konh, Mahsa, Wang, Yang, Pina, Marissa, Teplyakov, Andrew V., Xiao, John Q.
Zdroj: In Journal of Magnetism and Magnetic Materials 15 December 2022 564 Part 2
Databáze: ScienceDirect