Calibrate the non-orthogonal error of AFM with two-dimensional self-traceable grating
| Autor: | Tan, Wen, Tang, Zhaohui, Xiao, Guangxu, Yao, Yulin, Lei, Lihua, Li, Qing, Jin, Tao, Deng, Xiao, Cheng, Xinbin, Li, Tongbao |
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| Zdroj: | In Ultramicroscopy July 2023 249 |
| Databáze: | ScienceDirect |
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