Controlling the parameters of focused ion beam for ultra-precise fabrication of nanostructures
| Autor: | Kolomiytsev, A.S., Gromov, A.L., Il'in, O.I., Panchenko, I.V., Kotosonova, A.V., Ballouk, A., Rodriguez, D., Ageev, O.A. |
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| Zdroj: | In Ultramicroscopy April 2022 234 |
| Databáze: | ScienceDirect |
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