Resistivity contrast imaging in semiconductor structures using ultra-low energy scanning electron microscopy
| Autor: | Jóźwik, Iwona, Jagielski, Jacek, Dumiszewska, Ewa, Kamiński, Maciej, Kentsch, Ulrich |
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| Zdroj: | In Ultramicroscopy September 2021 228 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect