A new type of nanoscale reference grating manufactured by combined laser-focused atomic deposition and x-ray interference lithography and its use for calibrating a scanning electron microscope
| Autor: | Deng, Xiao, Dai, Gaoliang, Liu, Jie, Hu, Xiukun, Bergmann, Detlef, Zhao, Jun, Tai, Renzhong, Cai, Xiaoyu, Li, Yuan, Li, Tongbao, Cheng, Xinbin |
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| Zdroj: | In Ultramicroscopy July 2021 226 |
| Databáze: | ScienceDirect |
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