Photocatalytic assisted chemical mechanical polishing for silicon carbide using developed ceria coated diamond core-shell abrasives
| Autor: | Zhu, Xiaoxiao, Gui, Yuziyu, Fu, Hao, Ding, Juxuan, Mo, Zhangchao, Jiang, Xuesong, Sun, Jifei, Ban, Boyuan, Wang, Ling, Chen, Jian |
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| Zdroj: | In Tribology International September 2024 197 |
| Databáze: | ScienceDirect |
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