Effect of rotation of abrasives on material removal in chemical mechanical polishing using a proposed three-body model: Molecular dynamics simulation
| Autor: | Chen, Ruling, Zhou, Pengju, Li, Hui |
|---|---|
| Zdroj: | In Tribology International August 2024 196 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect