Modelling of polyurethane polishing pad surface topography and fixed-point polished surface profile
| Autor: | Wang, Zhao, Wang, Zixuan, Liang, Yingdong, Meng, Fanwei, Cui, Zhijie, Chen, Tao, Yang, Yue, Fan, Cheng, Yu, Tianbiao, Zhao, Ji |
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| Zdroj: | In Tribology International July 2024 195 |
| Databáze: | ScienceDirect |
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