Grinding mechanism and surface quality evaluation strategy of single crystal 4H-SiC
| Autor: | Qu, Shuoshuo, Wei, Chengxiang, Yang, Yuying, Yao, Peng, Chu, Dongkai, Gong, Yadong, Zhao, Dong, Zhang, Xianpeng |
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| Zdroj: | In Tribology International June 2024 194 |
| Databáze: | ScienceDirect |
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