Plasma-enhanced chemical vapor deposition of TiB2 and TiBN hard coatings using BBr3

Autor: Movassagh-Alanagh, Farid, Abdollah-Zadeh, Amir, Zolbin, Maryam Alizadeh, Nemati, Narguess, Aghababaei, Ramin
Zdroj: In Tribology International January 2023 179
Databáze: ScienceDirect