Tribological Property of ta-CNx:Ta Deposited via Ion Beam Assisted-Filtered Arc Deposition

Autor: Tokoroyama, T., Tagami, Y., Murashima, M., Lee, W.-Y., Umehara, N., Kousaka, H.
Zdroj: In Tribology International April 2022 168
Databáze: ScienceDirect