Tribological Property of ta-CNx:Ta Deposited via Ion Beam Assisted-Filtered Arc Deposition
Autor: | Tokoroyama, T., Tagami, Y., Murashima, M., Lee, W.-Y., Umehara, N., Kousaka, H. |
---|---|
Zdroj: | In Tribology International April 2022 168 |
Databáze: | ScienceDirect |
Externí odkaz: |