Effect of chlorine doping on tribological properties of amorphous carbon films deposited by plasma-based ion implantation and deposition
Autor: | Tokuta, Yuuki, Itoh, Takashi, Shiozaki, Takahiko, Kawaguchi, Masahiro, Sasaki, Shinya |
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Zdroj: | In Tribology International September 2017 113:377-382 |
Databáze: | ScienceDirect |
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