Effect of chlorine doping on tribological properties of amorphous carbon films deposited by plasma-based ion implantation and deposition

Autor: Tokuta, Yuuki, Itoh, Takashi, Shiozaki, Takahiko, Kawaguchi, Masahiro, Sasaki, Shinya
Zdroj: In Tribology International September 2017 113:377-382
Databáze: ScienceDirect