Atomically smooth gallium nitride surface prepared by chemical-mechanical polishing with S2O82−-Fe2+ based slurry
| Autor: | Shi, Xiaolei a, b, c, Zou, Chunli a, b, c, Pan, Guoshun a, b, c, ⁎, Gong, Hua a, b, c, Xu, Li a, b, c, Zhou, Yan a, b, c |
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| Zdroj: | In Tribology International June 2017 110:441-450 |
| Databáze: | ScienceDirect |
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