A phenomenological model of polishing of silicon with diamond abrasive
| Autor: | Agrawal, Paras M., Narulkar, R., Bukkapatnam, S., Raff, L.M., Komanduri, R. |
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| Zdroj: | In Tribology International January-February 2010 43(1-2):100-107 |
| Databáze: | ScienceDirect |
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