The comprehensive semantic segmentation approach for discrete feature of Si3N4 wafer microdamage

Autor:	Chen, Tao, Xia, Xin, Mei, Miao, Hu, Kun, Chen, Hu, Li, Jiao, Wu, Nanxing
Zdroj:	In Ceramics International November 2024
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect