Ti1-xAlxN or TiN + AlN: An investigation about Al influence on titanium aluminum nitride thin films structural organization

Autor: Dias, I.L., de Oliveira, P.R.A., Rezende, R.L., Sabino, L.F.S., Damasceno, I.Z., Stavale, F., Tentardini, E.K.
Zdroj: In Ceramics International November 2024
Databáze: ScienceDirect