Performance optimization of AlN ultrasonic thin-film sensors deposited by RF magnetron sputtering
| Autor: | Xu, Chang, Zeng, Xiaomei, Zhang, Xiangyu, Lv, Ting, Jiang, Yanghui, Wang, Zheng, Ma, Xuejiao, Ding, Yue, Zhang, Jun, Yang, Bing, Liu, Sheng, Pelenovich, Vasiliy O. |
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| Zdroj: | In Ceramics International November 2024 |
| Databáze: | ScienceDirect |
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