Optimization of abrasive slurry assisted rotating ultrasonic machining for enhanced micro-channel fabrication on ceramic silicon wafer (111)
| Autor: | Vishnoi, Mohit, Srivastava, Siddharth, Gangadhar, Mamatha Theetha, Singh, Vikrant, Malik, Vansh, Bansal, Anuj |
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| Zdroj: | In Ceramics International 15 December 2024 50(24) Part A:52314-52329 |
| Databáze: | ScienceDirect |
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