Ultrasonic-assisted stripping of single-crystal SiC after laser modification
| Autor: | Lv, Boyang, Ye, Linzheng, Zhu, Xijing, Liu, Yao, Chuai, Shida, Wang, Zexiao |
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| Zdroj: | In Ceramics International 15 November 2024 50(22) Part C:48517-48525 |
| Databáze: | ScienceDirect |
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