Surface passivation of silicon substrate by ternary GaxCeyOz layers grown via combination of forming gas and oxygen at different temperatures
Autor: | Kammutty Musliyarakath, Abdul Shekkeer, Cheong, Kuan Yew, Quah, Hock Jin |
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Zdroj: | In Ceramics International 15 July 2024 50(14):25528-25540 |
Databáze: | ScienceDirect |
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