Enhancing electronic properties by suppressing nucleation delay for low-temperature processed atomic-layer-deposited amorphous zinc–tin-oxide thin films

Autor: Hung, Hsin-Ning, Cheng, Ching-Yun, Cheng, I-Chun, Shyue, Jing-Jong, Wang, Ching-Chiun, Tsai, Feng-Yu
Zdroj: In Ceramics International 1 May 2024 50(9) Part A:15085-15091
Databáze: ScienceDirect