Influence of particle size distribution on dielectric, electrical, and microstructural properties of aerosol-deposited Ga2O3 film for advanced electronic device

Autor: Lee, Jun-Woo, Won, Jong Ho, Choi, Dong-Gyu, Jeon, Jwa-Bin, Kim, Sunghoon, Park, Chulhwan, Shin, Weon Ho, Won, Kanghee, Koo, Sang-Mo, Oh, Jong-Min
Zdroj: In Ceramics International 1 May 2024 50(9) Part A:14067-14076
Databáze: ScienceDirect