Cathodic arc deposition of nanocrystalline titanium nitride thin film on fluorine doped tin oxide coated glass substrate: Crystal structural, microstructural, mechanical, optical and electrical properties
| Autor: | Senthilselvan, Jayaraman, Pillai, Rajeev R., Kannan, Ramasubramanian, Baskar, B., Valleti, Krishna, Manonmani, J. |
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| Zdroj: | In Ceramics International 1 December 2023 49(23) Part A:37072-37088 |
| Databáze: | ScienceDirect |
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