Significantly reduced intrinsic dielectric constant and loss of nano-silica by direct fluorination

Autor: Chen, Siyao, He, Taijun, Li, Yongjiu, Li, Xin, Zhuang, Yongbing, Wang, Xu, Liu, Yang, Liu, Xiangyang
Zdroj: In Ceramics International 15 July 2023 49(14) Part A:22816-22825
Databáze: ScienceDirect