Oxygen plasma-assisted ultra-low temperature sol-gel-preparation of the PZT thin films

Autor: Li, Han, Hu, Yuhao, Wei, Siyue, Meng, Yingzhi, Wang, Ningzhang, Zhang, Qi, Liu, Laijun, Peng, Biaolin
Zdroj: In Ceramics International 1 April 2023 49(7):10864-10870
Databáze: ScienceDirect