Effect of hydroxy carboxylates as complexing agent on improving chemical mechanical polishing performance of M-plane sapphire and action mechanism analysis
| Autor: | Qu, Minghui, Niu, Xinhuan, Hou, Ziyang, Yan, Han, Luo, Fu |
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| Zdroj: | In Ceramics International 15 March 2023 49(6):9622-9631 |
| Databáze: | ScienceDirect |
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