A low-cost multilayer piezoelectric actuator for ultrasonic motor stator driving fabricated by a low-temperature co-fired ceramic process

Autor: Hu, Xiaopin, Cao, Teng, Wang, Boquan, Wen, Zhiyi, Yan, Kang, Wu, Dawei
Zdroj: In Ceramics International 15 February 2023 49(4):6119-6124
Databáze: ScienceDirect