A low-cost multilayer piezoelectric actuator for ultrasonic motor stator driving fabricated by a low-temperature co-fired ceramic process
Autor: | Hu, Xiaopin, Cao, Teng, Wang, Boquan, Wen, Zhiyi, Yan, Kang, Wu, Dawei |
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Zdroj: | In Ceramics International 15 February 2023 49(4):6119-6124 |
Databáze: | ScienceDirect |
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