Internal modified structure of silicon carbide prepared by ultrafast laser for wafer slicing
| Autor: | Zhang, Yuliang, Xie, Xiaozhu, Huang, Yaoan, Hu, Wei, Long, Jiangyou |
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| Zdroj: | In Ceramics International 1 February 2023 49(3):5249-5260 |
| Databáze: | ScienceDirect |
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