HfO2:Y2O3 ultrathin nanolaminate structures grown by ALD: Bilayer thickness and annealing temperature effects on optical properties
| Autor: | López - Medina, J., Vazquez – Arce, J., Pizá-Ruiz, P., Nedev, N., Farías, M.H., Tiznado, H. |
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| Zdroj: | In Ceramics International 15 June 2022 48(12):17564-17575 |
| Databáze: | ScienceDirect |
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